Overview
Nikon 5964C2MAFQ5KA M Plan 100X ELWD Spare Part: Precision Optics for Factory Uptime
The Nikon 5964C2MAFQ5KA is an original M Plan 100X/0.80 Extra Long Working Distance (ELWD) objective lens engineered for demanding industrial inspection and semiconductor process environments. As a maintenance-proven spare part, this objective is a critical component in automated optical inspection (AOI) systems, wafer surface analysis platforms, and precision metrology stations where continuous uptime is non-negotiable. Whether you are managing a scheduled annual overhaul, responding to an unplanned optical failure, or building a resilient spare parts inventory, the 5964C2MAFQ5KA delivers the original Nikon optical performance your system was qualified on — without the risk of compatibility drift that comes with third-party substitutes.
Sourced directly from authorized supply chains, each unit undergoes pre-shipment functional verification to confirm optical clarity, parfocal alignment, and mechanical thread integrity. With a support terms confirmed by quotation covering manufacturing defects and a documented compatibility profile for GAS HE and GAS NF3 process environments, this spare lens supports both reactive replacement and proactive stock strategies for maintenance engineers and procurement teams managing long-lifecycle inspection equipment.
Spare Maintenance Table
| SKU | 5964C2MAFQ5KA |
| Brand | Nikon |
| Series | M Plan (Metallurgical Plan Achromat) |
| Magnification | 100X |
| Numerical Aperture (NA) | 0.80 |
| Working Distance | ELWD (Extra Long Working Distance) |
| Tube Length | 210 / 0 (infinity-corrected) |
| Compatible Process Gas | GAS HE (5964C2MAFQ5KA) / GAS NF3 (5964C2MAGU5KA) |
| Thread Mount | Nikon M25 RMS-compatible industrial mount |
| Application Environment | Semiconductor fab, AOI, wafer inspection, industrial metrology |
| Origin | Japan |
| Weight | 360 g |
| Support terms | 12 Months (manufacturing defects) |
| Pre-Shipment Test | Optical clarity, parfocal alignment, thread integrity verified |
| Condition | Original / New Old Stock (NOS) as applicable |
Maintenance Planning for Continuous Operation
When replacing the Nikon 5964C2MAFQ5KA in an automated inspection station, a disciplined maintenance engineer will treat the objective swap as a trigger for a broader system health check. The objective interfaces directly with the nosepiece turret — inspect the turret locking mechanism and detent spring for wear before seating the replacement lens. Confirm that the illumination path is clean: the Nikon LV-UEPI2 or equivalent epi-illuminator should be checked for lamp alignment and condenser cleanliness, as contaminated illumination optics will degrade the performance of even a new 100X objective.
At the stage level, verify that the piezo Z-drive or motorized focus module (such as the Nikon Ti-ZDrive or equivalent OEM stage controller) is within calibrated travel limits. A worn or miscalibrated Z-drive will cause focus drift that is often misdiagnosed as an objective defect. Similarly, inspect the camera adapter and C-mount coupler for thread play — even 10 µm of mechanical slop at 100X magnification translates to significant image instability.
For systems operating in GAS HE or GAS NF3 environments, confirm that the gas purge fittings, flow regulators, and objective housing seals are intact before installing the 5964C2MAFQ5KA. Cross-reference with the companion SKU 5964C2MAGU5KA (NF3-rated variant) if your process gas specification has changed since the original system qualification. Additionally, review the status of the Nikon DS-Ri2 or equivalent digital camera head, the motorized nosepiece controller board, and any connected image acquisition PC interface cards — these components share the optical signal chain and should be confirmed operational before attributing image quality issues solely to the objective.
Procurement engineers building a spare parts buffer for high-utilization inspection lines should consider stocking at least one 5964C2MAFQ5KA alongside complementary spares: a 50X M Plan objective (e.g., Nikon 5964C2MAFQ4KA or equivalent) for lower-magnification cross-checks, a replacement nosepiece turret assembly, and a set of objective thread protector caps. Long OEM lead times — often 12 to 26 weeks for Nikon precision optics — make proactive inventory essential for lines that cannot tolerate extended downtime.
Site Replacement Workflow
Step 1 — Isolate and power down. Follow your site LOTO procedure. Power down the inspection station and allow the illumination lamp to cool for a minimum of 10 minutes before accessing the objective nosepiece.
Step 2 — Document the current configuration. Photograph the existing objective label, note the parfocal offset value stored in the system controller, and record the current Z-home calibration position. This data is required to restore focus calibration after the swap.
Step 3 — Remove the legacy objective. Using a clean lint-free glove, unthread the existing objective counterclockwise. If the objective has been in service for more than 18 months, inspect the thread for corrosion or debris before proceeding.
Step 4 — Inspect and prepare the nosepiece port. Clean the nosepiece thread with a dry cotton swab. Do not use solvents near the optical path. Verify the detent mechanism engages cleanly.
Step 5 — Install the 5964C2MAFQ5KA. Thread the new objective clockwise until the detent clicks. Do not overtighten. Confirm the objective is seated flush with the nosepiece face.
Step 6 — Restore calibration. Re-enter the parfocal offset and Z-home values recorded in Step 2. Run the system’s built-in focus calibration routine. Capture a reference image on a calibration target and compare against the baseline image archive to confirm optical performance is within specification.
Step 7 — Resume production. Log the replacement in your CMMS with the new objective serial number, installation date, and technician ID. Schedule the next inspection interval per your PM plan.
Spare Parts Support FAQ
Q1: Is the 5964C2MAFQ5KA a direct drop-in replacement for older Nikon M Plan 100X ELWD objectives?
A: Yes, for systems using the standard Nikon M25 industrial nosepiece mount and infinity-corrected (210/0) tube length. Verify your system’s tube lens specification before installation. If your system uses a finite tube length (e.g., 160 mm), this objective is not compatible without an optical adapter.
Q2: What is the difference between SKU 5964C2MAFQ5KA and 5964C2MAGU5KA?
A: Both are Nikon M Plan 100X/0.80 ELWD objectives with identical optical specifications. The 5964C2MAFQ5KA is rated for GAS HE (helium) process environments, while the 5964C2MAGU5KA is rated for GAS NF3 (nitrogen trifluoride) environments. Confirm your process gas specification before ordering.
Q3: How do you verify the objective is genuine before shipment?
A: Each unit is inspected under controlled lighting for optical clarity, surface coating integrity, and mechanical thread condition. The objective is tested for parfocal alignment using a calibrated reference target. A pre-shipment inspection report is available upon request.
Q4: What is your long-term supply commitment for this SKU?
A: We maintain a managed inventory buffer for the 5964C2MAFQ5KA to support customers with long-lifecycle inspection systems. All units are covered by a support terms confirmed by quotation from the date of shipment. For customers requiring guaranteed annual supply agreements or consignment stock arrangements, contact our sales team to discuss a dedicated spare parts program.
© 2026 KNMKS. All rights reserved.
Original Source: https://knmks.com
Contact: [email protected] | +86 18359268345
Product Identification
- Brand / Ecosystem
-
Other Brands
Assorted Brands - Model / Series
-
100 / 0.80 ELWD 210/0 GAS HE 5964C2MAFQ5KA GAS NF3 5964C2MAGU5KA
Assorted Series - Product Family
- Other Components
- Availability Status
- Available on request after model and quantity confirmation
- Inquiry Type
- B2B RFQ, replacement inquiry and project spare-part request
- Pre-Quote Check
- Exact SKU, brand, series, quantity, nameplate photos and destination country are checked before quotation
System Path
Where this product fits in the KNMKS automation structure.
Specification & Inquiry Focus
- Component range
- Breakers, terminals and cabinet accessories
- Common needs
- Model, photo and installation requirement
- Project support
- Maintenance and mixed spare-part inquiry
Buyer Confirmation
Information KNMKS checks before replying.
- Exact model
- 100 / 0.80 ELWD 210/0 GAS HE 5964C2MAFQ5KA GAS NF3 5964C2MAGU5KA
- Brand / ecosystem
- Other Brands
- Product family
- Other Components
- Application note
- Replacement, maintenance, project build or spare-part list
- Useful photos
- Nameplate, installed unit, cabinet layout or connector side
- Delivery details
- Quantity, destination country and target schedule
Document Support
Files and notes can be confirmed during quotation.
- Product photos or nameplate confirmation when available
- Packing and delivery notes before quotation confirmation
- Support scope and delivery terms confirmed per inquiry
- Export document coordination for qualified B2B requests
Inquiry Support
- Mixed automation spare parts inquiry
- Cabinet component and accessory support
- Model identification from photos or labels
What to Send Us
- Brand and exact model number: Other Brands 100 / 0.80 ELWD 210/0 GAS HE 5964C2MAFQ5KA GAS NF3 5964C2MAGU5KA
- Quantity and required delivery time
- Application, replacement requirement or nameplate photo
- Destination country and shipping preference
RFQ Preparation
This is a product inquiry page built for RFQ communication.
Fast Model Check
Send this model to KNMKS for confirmation.
Include quantity, destination country and photos if this is a maintenance replacement. The inquiry will be saved with a reference number after submission.
Brand & Compatibility Note
KNMKS displays automation product information for well-known industrial brand ecosystems and compatible replacement references. Brand names are used for product identification and compatibility reference only; final availability and commercial terms are confirmed per quotation.
Manufacturing
Machine Tools
Packaging
Energy & Power
PLCs & Controllers
HMI & Displays
Servo Systems
Variable Frequency Drives